Datasets:

ClarusC64
/

euv-illumination-pupil-coherence-drift-detection-v0.1

Error code:   DatasetGenerationCastError
Exception:    DatasetGenerationCastError
Message:      An error occurred while generating the dataset

All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})

This happened while the csv dataset builder was generating data using

hf://datasets/ClarusC64/euv-illumination-pupil-coherence-drift-detection-v0.1/data/test.csv (at revision 74071ca3babb74711dd510080c2a6897ccee7695), [/tmp/hf-datasets-cache/medium/datasets/57759762300218-config-parquet-and-info-ClarusC64-euv-illuminatio-3d7e88c7/hub/datasets--ClarusC64--euv-illumination-pupil-coherence-drift-detection-v0.1/snapshots/74071ca3babb74711dd510080c2a6897ccee7695/data/test.csv (origin=hf://datasets/ClarusC64/euv-illumination-pupil-coherence-drift-detection-v0.1@74071ca3babb74711dd510080c2a6897ccee7695/data/test.csv)]

Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)
Traceback:    Traceback (most recent call last):
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1887, in _prepare_split_single
                  writer.write_table(table)
                File "/usr/local/lib/python3.12/site-packages/datasets/arrow_writer.py", line 675, in write_table
                  pa_table = table_cast(pa_table, self._schema)
                             ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2272, in table_cast
                  return cast_table_to_schema(table, schema)
                         ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2218, in cast_table_to_schema
                  raise CastError(
              datasets.table.CastError: Couldn't cast
              id: string
              case_title: string
              pupil_centroid_shift_um: double
              pupil_ellipticity: double
              pupil_asymmetry_index: double
              dose_profile_skew: double
              cd_uniformity_nm: double
              sidewall_angle_deg: double
              baseline_coherence: double
              drift_score: double
              drift_flag: double
              notes: string
              constraints: string
              -- schema metadata --
              pandas: '{"index_columns": [{"kind": "range", "name": null, "start": 0, "' + 1926
              to
              {'id': Value('string'), 'case_title': Value('string'), 'pupil_centroid_shift_um': Value('float64'), 'pupil_ellipticity': Value('float64'), 'pupil_asymmetry_index': Value('float64'), 'dose_profile_skew': Value('float64'), 'cd_uniformity_nm': Value('float64'), 'sidewall_angle_deg': Value('float64'), 'baseline_coherence': Value('float64'), 'drift_score': Value('float64'), 'drift_flag': Value('int64'), 'notes': Value('string')}
              because column names don't match
              
              During handling of the above exception, another exception occurred:
              
              Traceback (most recent call last):
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 1347, in compute_config_parquet_and_info_response
                  parquet_operations = convert_to_parquet(builder)
                                       ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 980, in convert_to_parquet
                  builder.download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 884, in download_and_prepare
                  self._download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 947, in _download_and_prepare
                  self._prepare_split(split_generator, **prepare_split_kwargs)
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1736, in _prepare_split
                  for job_id, done, content in self._prepare_split_single(
                                               ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1889, in _prepare_split_single
                  raise DatasetGenerationCastError.from_cast_error(
              datasets.exceptions.DatasetGenerationCastError: An error occurred while generating the dataset
              
              All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})
              
              This happened while the csv dataset builder was generating data using
              
              hf://datasets/ClarusC64/euv-illumination-pupil-coherence-drift-detection-v0.1/data/test.csv (at revision 74071ca3babb74711dd510080c2a6897ccee7695), [/tmp/hf-datasets-cache/medium/datasets/57759762300218-config-parquet-and-info-ClarusC64-euv-illuminatio-3d7e88c7/hub/datasets--ClarusC64--euv-illumination-pupil-coherence-drift-detection-v0.1/snapshots/74071ca3babb74711dd510080c2a6897ccee7695/data/test.csv (origin=hf://datasets/ClarusC64/euv-illumination-pupil-coherence-drift-detection-v0.1@74071ca3babb74711dd510080c2a6897ccee7695/data/test.csv)]
              
              Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)

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id string	case_title string	pupil_centroid_shift_um float64	pupil_ellipticity float64	pupil_asymmetry_index float64	dose_profile_skew float64	cd_uniformity_nm float64	sidewall_angle_deg float64	baseline_coherence float64	drift_score float64	drift_flag int64	notes string
EUV-IPD-001	Nominal stable	0.9	0.05	0.07	0.03	1.7	88.4	0.95	0.04	0	Healthy regime
EUV-IPD-002	Minor centroid drift	1.4	0.06	0.09	0.05	2	87.9	0.92	0.08	0	Within tolerance
EUV-IPD-003	Ellipticity rising	1.9	0.09	0.12	0.06	2.4	87.2	0.88	0.14	0	Monitor
EUV-IPD-004	Asymmetry shift	2.3	0.11	0.16	0.08	2.9	86.6	0.83	0.22	1	Drift onset
EUV-IPD-005	Dose skew coupling	2.7	0.12	0.19	0.11	3.3	86	0.79	0.31	1	Coherence weakening
EUV-IPD-006	Vibration-like wobble	3.1	0.14	0.22	0.12	3.9	85.1	0.72	0.42	1	Predictable drift
EUV-IPD-007	Metrology mismatch	3.5	0.16	0.26	0.14	4.6	84.3	0.65	0.54	1	Strong drift
EUV-IPD-008	Control loop lag	3.9	0.18	0.3	0.16	5.3	83.6	0.58	0.66	1	Near instability
EUV-IPD-009	Severe asymmetry	4.4	0.21	0.34	0.19	6.1	82.4	0.49	0.78	1	Pre-failure
EUV-IPD-010	Loss of CD control	4.9	0.24	0.39	0.22	7.2	81.2	0.38	0.9	1	Critical drift

Purpose

Detect when illumination-pupil coupling begins to drift toward loss of critical dimension control.

This dataset maps coherence decay between:

pupil geometry
dose distribution
printed wafer metrics

The goal is to identify drift before feature collapse.

Task

Input system metrics.

Predict:

drift_score
drift_flag

Format: float,int

Example: 0.42,1

Why this matters

Lithography systems rarely fail instantly.
They drift.

Early detection prevents yield loss and tool downtime.

Evaluation

Absolute error on drift_score
Classification bonus for drift_flag

Format validity scored when ground truth absent.

Version

v0.1

Downloads last month: 17

Total file size:

6.45 kB