Datasets:

ClarusC64
/

euv-illumination-pupil-coherence-baseline-mapping-v0.1

Error code:   DatasetGenerationCastError
Exception:    DatasetGenerationCastError
Message:      An error occurred while generating the dataset

All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})

This happened while the csv dataset builder was generating data using

hf://datasets/ClarusC64/euv-illumination-pupil-coherence-baseline-mapping-v0.1/data/test.csv (at revision eafec8e561de02979fab5f5f072056ca0ee2e19f), [/tmp/hf-datasets-cache/medium/datasets/83672804908261-config-parquet-and-info-ClarusC64-euv-illuminatio-504d9ad9/hub/datasets--ClarusC64--euv-illumination-pupil-coherence-baseline-mapping-v0.1/snapshots/eafec8e561de02979fab5f5f072056ca0ee2e19f/data/test.csv (origin=hf://datasets/ClarusC64/euv-illumination-pupil-coherence-baseline-mapping-v0.1@eafec8e561de02979fab5f5f072056ca0ee2e19f/data/test.csv)]

Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)
Traceback:    Traceback (most recent call last):
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1887, in _prepare_split_single
                  writer.write_table(table)
                File "/usr/local/lib/python3.12/site-packages/datasets/arrow_writer.py", line 675, in write_table
                  pa_table = table_cast(pa_table, self._schema)
                             ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2272, in table_cast
                  return cast_table_to_schema(table, schema)
                         ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2218, in cast_table_to_schema
                  raise CastError(
              datasets.table.CastError: Couldn't cast
              id: string
              case_title: string
              illum_mirror_setting_vector: string
              pupil_centroid_shift_um: double
              pupil_ellipticity: double
              pupil_asymmetry_index: double
              dose_profile_skew: double
              printed_cd_uniformity_nm: double
              sidewall_angle_deg: double
              coherence_score: double
              notes: string
              constraints: string
              -- schema metadata --
              pandas: '{"index_columns": [{"kind": "range", "name": null, "start": 0, "' + 1846
              to
              {'id': Value('string'), 'case_title': Value('string'), 'illum_mirror_setting_vector': Value('string'), 'pupil_centroid_shift_um': Value('float64'), 'pupil_ellipticity': Value('float64'), 'pupil_asymmetry_index': Value('float64'), 'dose_profile_skew': Value('float64'), 'printed_cd_uniformity_nm': Value('float64'), 'sidewall_angle_deg': Value('float64'), 'coherence_score': Value('float64'), 'notes': Value('string')}
              because column names don't match
              
              During handling of the above exception, another exception occurred:
              
              Traceback (most recent call last):
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 1347, in compute_config_parquet_and_info_response
                  parquet_operations = convert_to_parquet(builder)
                                       ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 980, in convert_to_parquet
                  builder.download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 884, in download_and_prepare
                  self._download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 947, in _download_and_prepare
                  self._prepare_split(split_generator, **prepare_split_kwargs)
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1736, in _prepare_split
                  for job_id, done, content in self._prepare_split_single(
                                               ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1889, in _prepare_split_single
                  raise DatasetGenerationCastError.from_cast_error(
              datasets.exceptions.DatasetGenerationCastError: An error occurred while generating the dataset
              
              All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})
              
              This happened while the csv dataset builder was generating data using
              
              hf://datasets/ClarusC64/euv-illumination-pupil-coherence-baseline-mapping-v0.1/data/test.csv (at revision eafec8e561de02979fab5f5f072056ca0ee2e19f), [/tmp/hf-datasets-cache/medium/datasets/83672804908261-config-parquet-and-info-ClarusC64-euv-illuminatio-504d9ad9/hub/datasets--ClarusC64--euv-illumination-pupil-coherence-baseline-mapping-v0.1/snapshots/eafec8e561de02979fab5f5f072056ca0ee2e19f/data/test.csv (origin=hf://datasets/ClarusC64/euv-illumination-pupil-coherence-baseline-mapping-v0.1@eafec8e561de02979fab5f5f072056ca0ee2e19f/data/test.csv)]
              
              Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)

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id string	case_title string	illum_mirror_setting_vector string	pupil_centroid_shift_um float64	pupil_ellipticity float64	pupil_asymmetry_index float64	dose_profile_skew float64	printed_cd_uniformity_nm float64	sidewall_angle_deg float64	coherence_score float64	notes string
EUV-IPB-001	Nominal baseline	[0.12,0.05,-0.03,0.08]	0.8	0.04	0.06	0.03	1.6	88.5	0.95	Stable coupling
EUV-IPB-002	Stable recentered	[0.11,0.06,-0.02,0.07]	0.9	0.05	0.07	0.04	1.7	88.2	0.94	Tight pupil control
EUV-IPB-003	Minor asymmetry	[0.13,0.04,-0.04,0.09]	1.2	0.06	0.1	0.05	1.9	87.8	0.91	Small asymmetry rise
EUV-IPB-004	Centroid drift	[0.14,0.03,-0.05,0.10]	1.8	0.07	0.12	0.06	2.3	87.1	0.86	Pupil offset growing
EUV-IPB-005	Ellipticity growth	[0.15,0.02,-0.06,0.11]	2.1	0.1	0.14	0.07	2.7	86.5	0.82	Shape distortion
EUV-IPB-006	Asymmetry rising	[0.16,0.01,-0.06,0.12]	2.4	0.11	0.18	0.08	3.1	85.9	0.76	Sidewall drift begins
EUV-IPB-007	Dose skew impact	[0.15,0.00,-0.07,0.13]	2.6	0.12	0.2	0.11	3.6	85.1	0.69	CD uniformity worsens
EUV-IPB-008	Vibration-like wobble	[0.17,-0.01,-0.08,0.14]	3	0.14	0.24	0.12	4.2	84.2	0.6	Coherence weakening
EUV-IPB-009	Metrology bias onset	[0.18,-0.02,-0.09,0.15]	3.4	0.16	0.27	0.14	4.9	83.3	0.5	Pupil/wafer link noisy
EUV-IPB-010	Near loss of control	[0.19,-0.03,-0.10,0.16]	3.9	0.18	0.31	0.16	5.8	82	0.38	Control near collapse

What this dataset is

This dataset benchmarks baseline coherence between:

illumination mirror settings
measured pupil shape
printed wafer outcomes

It captures when the illumination system stays inside a stable, predictable coupling regime.

Task

Given illumination and pupil metrics, predict:

coherence_score

A scalar in 0..1 describing how strongly pupil shape and mirror settings predict wafer CD uniformity and sidewall angle.

Inputs

illum_mirror_setting_vector
pupil_centroid_shift_um
pupil_ellipticity
pupil_asymmetry_index
dose_profile_skew

Context outputs

printed_cd_uniformity_nm
sidewall_angle_deg

Target

coherence_score

Why it matters

Critical dimension control fails when illumination coherence degrades. This can happen without an obvious single alarm.

Baseline mapping defines the healthy manifold so drift and failure horizon can be detected later.

Output format

Return a single float between 0 and 1.

Example: 0.82

Evaluation

Absolute error scoring when ground truth exists. If ground truth is absent, format validity is scored.

Version

v0.1

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Total file size:

6.94 kB